A MEMS microphone is one that is made using micro-electromechanical system (MEMS) processing techniques. MEMS Microphones are also known as microphone chips and silicon microphones. These microphones are successfully etched into a semiconductive silicon wafer. Behind a stationary perforated plate is etched a pressure-sensitive moveable membrane (diaphragm). A capacitor is formed by the perforated stationary plate and the diaphragm working together (much like the design of a condenser microphone). MEMS microphones, like most MEMS technologies, are manufactured on production lines using semiconductor silicon wafers and highly automated processes. On top of the silicon wafer, different layers of different materials are stacked, and then unneeded material is etched away.
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